Surface analysis by means of ion beams
Author:
- 1 June 1976
- journal article
- research article
- Published by Taylor & Francis in C R C Critical Reviews in Solid State Sciences
- Vol. 6 (3) , 291-316
Abstract
If a solid surface is bombarded by ions in the keV range, complex processes of energy transfer and electronic interaction happen in the surface zone of the solid. As a result of these different processes, atomic and molecular particles, electrons, and photons are emitted. In addition, various changes in the surface zone of the target take place.Keywords
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