Laser interferometric system for displacement measurement with high precision
Author:
- 1 April 1991
- journal article
- Published by IOP Publishing in Nanotechnology
- Vol. 2 (2) , 88-95
Abstract
A practical method for measuring displacement with a newly developed laser interferometric system is proposed. The new system has a simplified optical layout, fewer optical elements, and a shortened pass. As a result, the thermal drift and non-linearity of the displacement measurement have been decreased in both the bi-frequency heterodyne system and the fringe-counting system. In addition, simplified electrical fringe counting logic has shortened the time needed to obtain the measured value without losing accuracy. This method achieved (i) sub-nanometer resolution (0.6 nm/LSB), (ii) high stability (2.5 nm/day), (iii) high linearity (less than 1 LSB), and (iv) high following speed (more than 1000mm s-1).Keywords
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- Laser interferometer system for metrology and machine tool applicationsPrecision Engineering, 1983
- An unmodulated bi-directional fringe-counting interferometer system for measuring displacementPrecision Engineering, 1979