Biaxial resonant 7mm-MEMS mirror for automotive LIDAR application

Authors:

1 August 2012

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

No. 21605033,p. 150-151
DOI:10.1109/omems.2012.6318847

Abstract

A resonant biaxial comb-actuated 7mm-MEMS scanning mirror with tripod-suspension is developed to provide omnidirectional scanning in an automotive time-of-flight LIDAR sensor application. Wafer level vacuum packaging technology is applied to enable circular scanning at 550Hz at large tilt angle.

Keywords

MIRRORS
MICROMECHANICAL DEVICES
MEASUREMENT BY LASER BEAM
LASER BEAMS
LENSES
AUTOMOTIVE ENGINEERING
TIME MEASUREMENT

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A Novel Fabrication Technology for Waferlevel Vacuum Packaged Microscanning Mirrors
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A novel micromachining technology for structuring borosilicate glass substrates
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