Modeling of MOEMS electromagnetic scanning grating mirror for NIR micro-spectrometer
Authors:
Open Access
- 1 February 2016
- journal article
- conference paper
- Published by AIP Publishing in AIP Advances
- Vol. 6 (2) , 025025
Abstract
In this paper, the mathematical model is developed for researching the detailed electromagnetic mechanism of MOEMS scanning mirror. We present the relationship between spectral range and optical scanning angle. Furthermore, the variation tendencies of resonant frequency and maximal torsional angle are studied in detail under different aspect ratios of MOEMS scanning mirror and varied dimensions of torsional bar. The numerical results and Finite Element Analysis simulations both indicate that the thickness of torsional bar is the most important factor. The maximal torsional angle appears when the aspect ratio equals to 1. This mathematical model is an effective way for designing the MOEMS electromagnetic scanning grating mirror in actual fabrication.Keywords
Funding Information
- National Natural Science Foundation of China (61327002)
This publication has 17 references indexed in Scilit:
- High-Q MEMS Resonators for Laser Beam Scanning DisplaysMicromachines, 2012
- Near infrared reflectance spectroscopy (NIRS) could be used for characterization of soil nematode communitySoil Biology and Biochemistry, 2011
- Piezoelectric scanning mirrors for endoscopic optical coherence tomographyJournal of Micromechanics and Microengineering, 2009
- A feasibility study on on-line determination of rice wine composition by Vis–NIR spectroscopy and least-squares support vector machinesFood Chemistry, 2009
- A large vertical displacement electrothermal bimorph microactuator with very small lateral shiftSensors and Actuators A: Physical, 2008
- Issues in development of NIR micro spectrometer system for on-line process monitoring of milk productMeasurement, 2003
- Linearization of electrostatically actuated surface micromachined 2-D optical scannerJournal of Microelectromechanical Systems, 2001
- Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioningJournal of Microelectromechanical Systems, 1998
- Micromachined electromagnetic scanning mirrorsOptical Engineering, 1997
- Deformable grating optical modulatorOptics Letters, 1992