High resolution focussed ion beam implantation with post objective lens retarding and acceleration
Authors:
- 31 January 1994
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 23 (1-4) , 119-122
Abstract
No abstract availableKeywords
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- A focused ion beam system with a retarding mode objective lensJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 1991
- Fabrication of a GaAs quantum-well-wire structure by Ga focused-ion-beam implantation and its optical propertiesPhysical Review B, 1988