Drilling of Sub-100 μm Hourglass-Shaped Holes in Diamond with Femtosecond Laser Pulses

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Abstract
A Micro holes in a diamond are presented by using a homemade femtosecond (fs) Yb:KGW laser. An fs laser source was used emitting pulse duration of 230 fs at 1030 nm wavelength, whereas the spot size amounted to 8.9 μm. Parameters like pulse energy, and pulse number were varied over a wide range in order to evaluate their influence both on the micro hole geometry like hole diameter, circularity, taper angle, and on the drilling quality. Hourglass-shaped micro holes whose diameters decrease and increase again after a certain depth have important applications. The results demonstrate the feasibility of extending the drilling of an hourglass-shaped hole in a diamond sample, which has similar diameters at the hole entrance (92 μm) and exit (95 μm), but a much smaller diameter (28 μm) at a certain waist section inside the hole.

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