ZnO on Si integrated acoustic sensor
Authors:
- M. RoyerMRM. Royer
- J.O. HolmenJHJ.O. Holmen
- M.A. WurmMWM.A. Wurm
- O.S. AadlandOAO.S. Aadland
- M. GlennMGM. Glenn
- 1 January 1983
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 4, 357-362
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Silicon as a mechanical materialProceedings of the IEEE, 1982