Ar+ laser crystallization of a-Si:H film for active layer of TFT
Authors:
- Xinfan HuangXHXinfan Huang
- Zhifeng LiZLZhifeng Li
- Qing GuQGQing Gu
- Ximao BoaXBXimao Boa
- Kunji ChenKCKunji Chen
- 1 December 1989
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 115 (1-3) , 78-80
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Drift-mobility measurements in amorphous semiconductors using traveling-wave methodPhysical Review B, 1983