Orientation Dependence of the Oxidation of SiC Surfaces
Authors:
- 1 July 1997
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 162 (1) , 299-304
Abstract
No abstract availableKeywords
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- Thermal oxidation and electrical properties of silicon carbide metal-oxide-semiconductor structuresJournal of Applied Physics, 1993
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