Design and fabrication of scanning mirror for laser display
Authors:
- Jin-Ho LeeJLJin-Ho Lee
- Young-Chul KoYKYoung-Chul Ko
- Do-Hyun KongDKDo-Hyun Kong
- Jong-Min KimJKJong-Min Kim
- Ki Bang LeeKLKi Bang Lee
- Duk-Young JeonDJDuk-Young Jeon
- 1 February 2002
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 96 (2-3) , 223-230
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Laser display technology2002
- Fabrication of silicon optical scanner for laser display2000
- Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuatorJournal of Microelectromechanical Systems, 1999
- 200-in. full-color laser projection display1998
- MOEM scan engine for bar code reading and factory automation1998
- Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioningJournal of Microelectromechanical Systems, 1998