Two-axis MEMS scanners with radial vertical combdrive actuators—design, theoretical analysis, and fabrication
Authors:
- Jui-Che TsaiJui-Che Tsai
- Sheng-Jie ChiouSCSheng-Jie Chiou
- Tien-Liang HsiehTHTien-Liang Hsieh
- Chia-Wei SunCSChia-Wei Sun
- Dooyoung HahDooyoung Hah
- Ming C WuMing C Wu
- 28 March 2008
- journal article
- Published by IOP Publishing in Journal of Optics A: Pure and Applied Optics
- Vol. 10 (4)
Abstract
No abstract availableKeywords
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