Thermoelectric evaluation of the dopant density of p-type InAs

Thermoelectric measurements were performed on $p$ -type InAs thin films grown by metalorganic vapor phase epitaxy. The measured Seebeck coefficient displayed an anomalous temperature dependence due to the existence of a highly conductive surface inversion layer. The effect of a degenerate conduction layer has been incorporated into our analysis and revealed that the sign-reversal temperature of the Seebeck coefficient remained unaffected by the surface layer. This finding consequently facilitated the direct determination of the acceptor density of lightly doped thin film InAs.