A low-power 3-axis digital-output MEMS gyroscope with single drive and multiplexed angular rate readout

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Abstract
Motivated by the increasing demand of integrated inertial-sensing solutions for motion processing and dead-reckoning navigation in handheld devices and low cost GPS navigators, this paper reports the details of a 3-axis silicon MEMS vibratory gyroscope that fulfills the pressing market requirements for low power consumption, small size and low cost. Thanks to a compact mechanical design that combines a triple tuning-fork structure within a single vibrating element, our solution achieves satisfactory performance in terms of thermal stability, cross axis error, and acoustic noise immunity by using a small die size. Furthermore, the presence of a single primary vibration mode for the excitation of the 3 tuning-forks, together with the possibility of sensing the pickoff modes in a multiplexing fashion, allows to design a small-area, low-power ASIC.