T8-Hydridospherosiloxanes: novel precursors for silicon dioxide thin films. 1. Precursor characterization and preliminary CVD

Authors:
  • MNM. D. Nyman
    M. D. Nyman
  • SDS. B. Desu
    S. B. Desu
  • CPC. H. Peng
    C. H. Peng
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