Mechanical characterization and stress engineering of nanocrystalline diamonds films for MEMS applications
Authors:
- F.J. Hernández GuillénFGF.J. Hernández Guillén
- 1 March 2005
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 14 (3-7) , 411-415
Abstract
No abstract availableKeywords
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