Analytical solution for capacitive RF sheath
Author:
- M.A. LiebermanMLM.A. Lieberman
- 1 January 1988
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 16 (6) , 638-644
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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