Measurement and nonlinear analysis of an inertial sensor with micropillar gap filler under voltage modulation

This publication has 54 references indexed in Scilit:

• Modeling and analysis of a capacitive MEMS with a microstructured gap subjected to a mechanical shock
  Acta Mechanica, 2024
• Flexible capacitive pressure sensor sensitized by tilted micropillar structures fabricated by two-photon polymerization
  Journal of Materials Science: Materials in Electronics, 2024
• Nonlinear dynamics of a piezoelectrically laminated initially curved microbeam resonator exposed to fringing-field electrostatic actuation
  Nonlinear Dynamics, 2023
• Nonlinear dynamics of a tunable novel accelerometer, tunable with a microtriple electrode variable capacitor
  Acta Mechanica, 2023
• On the nonlinear dynamics of a piezoresistive based mass switch based on catastrophic bifurcation
  International Journal of Mechanics and Materials in Design, 2023
• Material dielectricity effects on the performance of capacitive micro-devices: a nonlinear study
  International Journal of Mechanics and Materials in Design, 2023
• Dynamic analysis of a novel wide-tunable microbeam resonator with a sliding free-of-charge electrode
  Nonlinear Dynamics, 2023
• A review on the nonlinear dynamics of hyperelastic structures
  Nonlinear Dynamics, 2022
• High Dielectric Constant (Highk) Polymer Composites
  2021
• Thermo-elastic damping in a functionally graded piezoelectric micro-resonator
  International Journal of Mechanics and Materials in Design, 2014