Enhanced Carbon Sputtering and Detection in Helium Plasma: A Comparative Study of Hollow Cathode and Flat Electrode Discharges Under Pressure-Voltage Modulation
- 1 September 2026
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 54 (9) , 4347-4354
Abstract
No abstract availableFunding Information
- National Key Research and Development Program of China (2022YFE0204100)
- National Natural Science Foundation of China (12205067)
- Heilongjiang Postdoctoral Fund (LBHZ23023)
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