Theoretical Considerations on Lateral Spread of Implanted Ions
Authors:
- Seijiro FurukawaSFSeijiro Furukawa
- Hideki MatsumuraHMHideki Matsumura
- Hiroshi IshiwaraHIHiroshi Ishiwara
- 1 February 1972
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 11 (2) , 134-142