Design of smart drivers for electrostatic MEMS switches
Authors:
- Norbert DumasNDNorbert Dumas
- Carlo TrigonaCTCarlo Trigona
- Patrick PonsPPPatrick Pons
- Laurent LatorreLLLaurent Latorre
- Pascal NouetPNPascal Nouet
- 1 June 2011
- journal article
- research article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 167 (2) , 422-432
Abstract
No abstract availableKeywords
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