Silicon condenser microphone with integrated field-effect transistor
Author:
- W. KühnelWKW. Kühnel
- 1 March 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 26 (1-3) , 521-525
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- A subminiature condenser microphone with silicon nitride membrane and silicon back plateThe Journal of the Acoustical Society of America, 1989