Development of high-quality TiO2 photonics with E-gun evaporation

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Abstract
In this work, we demonstrate the fabrication of high-quality (Q) TiO2 waveguide resonators by E-gun evaporation. The deposited titanium dioxide (TiO2) films exhibit superior roughness below 1 nm, demonstrating high-Q TiO2 integrated photonics. By employing the low-temperature, high-deposition-rate evaporation process, both low-confined and high-confined TiO2 waveguides are investigated, highlighting their potential for applications in nonlinear and quantum photonics. Meanwhile, the Q factor of waveguide resonators can reach approximately 1.1 × 105. With an optimized pulley coupling design, high extinction ratios (ER) above 27.1 dB for the silicon substrate and 68.7 dB for the glass substrate are achieved, respectively. This work shows the potential in fabricating both high-Q, high-ER waveguide resonators, and highly confined TiO2 photonic waveguides with E-gun evaporation for applications in co-packaged optics.
Funding Information
  • National Science and Technology Council (114-2221-E-A49 -042 -MY3, 113-2221-E-A49-191, 113-2622-8-008-001-SB)
  • Taiwan Semiconductor Manufacturing Company (TUP-20241015-0017)
  • Taiwan Semiconductor Research Institute (JDP114-Y1-008)

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