The evaluation of polymers for electron resists by mass loss measurements
Authors:
- 31 December 1987
- Vol. 28 (4) , 675-679
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Electron beam damage of amorphous synthetic polymersUltramicroscopy, 1984
- Copolymer electron resists: poly(stryene-methyl methacrylate) copolymersPolymer, 1983
- Fourier‐transform infrared studies of polymer blends. II. Poly(ϵ‐caprolactone)–poly(vinyl chloride) systemJournal of Polymer Science: Polymer Physics Edition, 1979
- High-resolution Positive Resists for Electron-beam ExposureIBM Journal of Research and Development, 1968