Laser-Assisted Etching of EagleXG Glass by Irradiation at Low Pulse-Repetition Rate
Open Access
- 18 January 2022
- journal article
- research article
- Published by MDPI AG in Applied Sciences
- Vol. 12 (3) , 948
Abstract
Femtosecond laser micromachining is becoming an established technique for the fabrication of complex three-dimensional structures in glass. The combination of laser writing and chemical etching increases the technique versatility by allowing the fabrication of hollow structures within the bulk material. The possibility to encompass both optical and fluidic components in a single substrate allows us to realize optofluidic devices usable in several application fields. Here, we present new investigations of laser-assisted etching in Eagle XG glass showing good etching conditions at low repetition rates, where thermal effects can be neglected, and low irradiation speeds, which allow for complex microchannel network formation.Keywords
This publication has 26 references indexed in Scilit:
- Towards low-loss lightwave circuits for non-classical optics at 800 and 1,550 nmApplied Physics A, 2013
- Optofluidic integrated cell sorter fabricated by femtosecond lasersLab on a Chip, 2012
- Measuring protein concentration with entangled photonsApplied Physics Letters, 2012
- High refractive index contrast in fused silica waveguides by tightly focused, high-repetition rate femtosecond laserJournal of Non-Crystalline Solids, 2011
- Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOHApplied Surface Science, 2009
- Examination of Etching Agent and Etching Mechanism on Femotosecond Laser Microfabrication of Channels Inside Vitreous Silica SubstratesThe Journal of Physical Chemistry C, 2009
- Micromachining of photonic devices by femtosecond laser pulsesJournal of Optics A: Pure and Applied Optics, 2008
- Transition from thermal diffusion to heat accumulation in high repetition rate femtosecond laser writing of buried optical waveguidesOptics Express, 2008
- Integration of optical waveguides and microfluidic channels both fabricated by femtosecond laser irradiationApplied Physics Letters, 2007
- Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etchingApplied Physics A, 2006