Multilayer Fabrication Process for Josephson Junction Circuits Cross-Compatible Over Two Foundries
Authors:
- 22 March 2016
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Applied Superconductivity
- Vol. 26 (6) , 1-5
Abstract
We have developed a thin-film fabrication process that allows for the manufacturing of Josephson-junction-based devices from the same layout data either in the VTT Technical Research Centre of Finland foundry in Espoo, Finland or in the FLUXONICS foundry at the Leibniz-Institut fur Photonische Technologien in Jena, Germany. Automated scripts are used to derive either VTT-compatible or FLUXONICS-compatible mask plates from the same layout data. Test circuits have been fabricated at both foundries from the same layout data and their correct operation verified.Keywords
Funding Information
- European Community 7th Framework Program (FP7/2007-2013)
- E-SQUID project (262947)
This publication has 16 references indexed in Scilit:
- Fabrication Process and Properties of Fully-Planarized Deep-Submicron Nb/Al– $\hbox{AlO}_{\rm x}\hbox{/Nb} $ Josephson Junctions for VLSI CircuitsIEEE Transactions on Applied Superconductivity, 2014
- Planarized, Extendible, Multilayer Fabrication Process for Superconducting ElectronicsIEEE Transactions on Applied Superconductivity, 2014
- Cryogenic time-domain multiplexer based on SQUID arrays and superconducting/normal conducting switchesJournal of Physics: Conference Series, 2014
- Improved Operating Range of RSFQ-Controlled Current Steering SwitchesIEEE Transactions on Applied Superconductivity, 2014
- Code-division multiplexing of superconducting transition-edge sensor arraysSuperconductor Science and Technology, 2010
- Sub-micrometer-sized, cross-type Nb–AlOx–Nb tunnel junctions with low parasitic capacitanceSuperconductor Science and Technology, 2009
- A SQUID multiplexer with superconducting-to-normalconducting switchesSuperconductor Science and Technology, 2008
- Characterisation of a TES-Based X-ray Microcalorimeter in the Energy Range from 150 to 1800 eV Using an Adiabatic Demagnetisation RefrigeratorJournal of Low Temperature Physics, 2008
- Critical Field for Complete Vortex Expulsion from Narrow Superconducting StripsPhysical Review Letters, 2004
- Josephson quantum interference computer devicesIEEE Transactions on Magnetics, 1977