Low-temperature anodic bonding using lithium aluminosilicate-β-quartz glass ceramic
Authors:
- Shuichi ShojiSSShuichi Shoji
- Hiroto KikuchiHKHiroto Kikuchi
- Hirotaka TorigoeHTHirotaka Torigoe
- 1 January 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 64 (1) , 95-100
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Field-assisted bonding below 200 °C using metal and glass thin-film interlayersApplied Physics Letters, 1987