Numerical Modeling of a Rectangular Type Inductively Coupled Plasma System
Author:
- Jung-Hoon JooJJJung-Hoon Joo
- 31 August 2012
- journal article
- Published by The Korean Institute of Surface Engineering in Journal of the Korean institute of surface engineering
- Vol. 45 (4) , 174-180
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Effect of RF Bias on Electron Energy Distributions and Plasma Parameters in Inductively Coupled PlasmaJournal of the Korean Vacuum Society, 2012
- Design of an Inductively Coupled Plasma Source with Consideration of Electrical Properties and its Practical IssuesJournal of the Korean Vacuum Society, 2009
- Computational Fluid Dynamic Modeling for Internal Antenna Type Inductively Coupled Plasma SystemsJournal of the Korean Vacuum Society, 2009
- The Present Status of Development of Inductively Coupled Plasma Simulator based on Fluid ModelJournal of the Korean Vacuum Society, 2009
- The finite size effect in a planar inductively coupled plasmaJournal of Applied Physics, 2000