Fast and reliable closed-loop wafer-level measurement of gyroscopes drive quality factor

Authors:

1 February 2016

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 119-120
DOI:10.1109/isiss.2016.7435561

Abstract

The work proposes a versatile tool for closed-loop operation of MEMS gyroscopes at wafer level, as a mean both to improve existing characterization techniques, and as well to introduce innovative characterization features. These pages specifically address the need for fast measurements of drive-mode quality factors for gyroscopes at large volumes.

Keywords

Q-FACTOR
FREQUENCY MEASUREMENT
GYROSCOPES
MICROMECHANICAL DEVICES
Q MEASUREMENT
FITTING
TEMPERATURE MEASUREMENT

This publication has 2 references indexed in Scilit:

Demonstration of 1 Million $Q$ -Factor on Microglassblown Wineglass Resonators With Out-of-Plane Electrostatic Transduction
Journal of Microelectromechanical Systems, 2014
Optical Measurement of Static and Dynamic Displacement in MEMS
2010