A new chloride based chemistry that bypasses many of the traditional pitfalls of Lithium Niobate (LN) epitaxy including the need for electron beam evaporation of refractory metals, and use of complex metal organic precursors prone to pre-reaction is detailed. Methods of dealing with the normally corrosive chloride based chemistry in a Molecular Beam Epitaxy (MBE) chamber are detailed. These methods include careful opening procedures to minimize moisture uptake and a highly effective Li-getter pump that forms a natural desiccant material, LiCl, enhancing water pumping and minimizing corrosive HCl production. The present state of heteroepitaxy of LN on semiconductors is presented with novel optoelectronic and electronic device concepts presented as motivation for development of this multifunctional material - semiconductor system. Future multifunctional applications offer much promise but also strongly hinge on the limits of film quality that can be achieved.