Depolarization artifacts in dual rotating-compensator Mueller matrix ellipsometry
- 14 March 2016
- journal article
- research article
- Published by IOP Publishing in Journal of Optics
- Vol. 18 (5) , 055701
Abstract
Noticeable depolarization effects are observed in the measurement of the air using an in-house developed dual rotating-compensator Mueller matrix ellipsometer. We demonstrate that these depolarization effects are essentially artifacts and mainly induced when the compensator with wavelength-dependent optical properties is integrated with the finite bandwidth detector. We define a general formula to represent the actual Mueller matrix of the compensator by taking into account the depolarization artifacts. After incorporating this formula into the system model, a correction method is further proposed, and consequently, improved accuracy can be achieved in the Mueller matrix measurement.Keywords
Funding Information
- Program for Changjiang Scholars and Innovative Research Team in University of China (IRT13017)
- Provincial Natural Science Foundation of Hubei (2015CFA005, 2015CFB278)
- National Natural Science Foundation of China (51475191; 51405172; 51575214; 51525)
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