ScAlN-on-SiC Kᵤ-Band Sezawa Solidly-Mounted Bidimensional Mode Resonators

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Abstract
This letter reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) exploiting a highly-optimized Sezawa mode in 30% Scandium-doped Aluminum Nitride (ScAlN) on Silicon Carbide (SiC) and operating near 16 GHz. Experimental results demonstrate mechanical quality factors ( ${Q}_{m}$ ) as high as 380, Bode quality factors ( ${Q}_{\textit {Bode}}$ ) approaching 500, electromechanical coupling coefficients ( ${k}_{t}^{{2}}$ ) of 4.5%, an overall Figure of Merit ( $\textit {FOM} = {Q}_{m} \cdot {k}_{t}^{{2}}$ ) exceeding 17, and power handling greater than 20 dBm for devices closely matched to $50~\Omega $ . To the best of the authors’ knowledge, S2MRs exhibit the highest Key Performance Indicators (KPIs) among solidly mounted resonators in the Ku-band, paving the way for the integration of nanoacoustic devices on fast substrates with high-power electronics, tailored for military and harsh-environment applications.
Funding Information
  • Defense Advanced Research Project Agency Microsystems Technology Office (DARPA MTO) COFFEE TA1 Project and Developed in Collaboration with c Missiles and Defense and Naval Research Laboratory (HR001122C0088)

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