Characterization of Si/SiO2 interface defects by electron spin resonance

Authors:

EPEdward H. Poindexter
Edward H. Poindexter
PCPhilip J. Caplan
Philip J. Caplan

Publisher website

1 January 1983

journal article
review article
Published by Elsevier in Progress in Surface Science

Vol. 14 (3) , 201-294
DOI:10.1016/0079-6816(83)90006-0

Abstract

No abstract available

Keywords

This publication has 54 references indexed in Scilit:

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