Depth profiling of thin plasma-polymerized amine films using GDOES in an Ar-O2 plasma
Authors:
- Janez KovačJKJanez Kovač
- Jernej EkarJEJernej Ekar
- Miha ČekadaMČMiha Čekada
- Lenka ZajíčkováLZLenka Zajíčková
- David NečasDNDavid Nečas
- Lucie BlahováLBLucie Blahová
- Jiang Yong WangJWJiang Yong Wang
- Miran MozetičMMMiran Mozetič
Open Access
- 1 April 2022
- journal article
- research article
- Published by Elsevier in Applied Surface Science
- Vol. 581
Abstract
No abstract availableKeywords
Funding Information
- Czech Science Foundation
- Public Research Agency of the Republic of Slovenia (L2-1728, P2-0082)
- MEYS CR (21-12132J)
This publication has 36 references indexed in Scilit:
- Plasma etching: Yesterday, today, and tomorrowJournal of Vacuum Science & Technology A, 2013
- Microstructured electrodeposited polypyrrole–phthalocyanine hybrid material, from morphology to ammonia sensingJournal of Materials Chemistry, 2012
- Removal of Ar + beam‐induced damaged layers from polyimide surfaces with argon gas cluster ion beamsSurface and Interface Analysis, 2010
- Theoretical insight into Ar–O2surface-wave microwave dischargesJournal of Physics D: Applied Physics, 2010
- Investigation of the drastic change in the sputter rate of polymers at low ion fluenceNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2005
- Investigations of the effect of hydrogen, nitrogen or oxygen on the in-depth profile analysis by radiofrequency argon glow discharge-optical emission spectrometryJournal of Analytical Atomic Spectrometry, 2003
- The influence of hydrogen, nitrogen or oxygen additions to radiofrequency argon glow discharges for optical emission spectrometryJournal of Analytical Atomic Spectrometry, 2002
- XPS study of ion beam modified polyimide filmsThin Solid Films, 2000
- Effects of a controlled addition of nitrogen and oxygen to argon on the analytical parameters of glow discharge optical emission spectrometryJournal of Analytical Atomic Spectrometry, 1994
- Eine neue glimmentladungslampe für die optische emissionsspektralanalyseSpectrochimica Acta Part B: Atomic Spectroscopy, 1968