Low permittivity dielectrics and global planarization for quarter-micron multilevel interconnections
Authors:
- Yoshio HommaYHYoshio Homma
- Takeshi FurusawaTFTakeshi Furusawa
- Hiroyuki MorishimaHMHiroyuki Morishima
- Hidetada SatoHSHidetada Sato
- 31 July 1997
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 41 (7) , 1005-1011
Abstract
No abstract availableKeywords
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- Water-related degradation of contacts in the multilevel MOS IC with spin-on glasses as interlevel dielectricsIEEE Electron Device Letters, 1989