Fabrication of millimeter-long structures in sapphire using femtosecond infrared laser pulses and selective etching
Authors:
- L. CapuanoLCL. Capuano
- R.M. TiggelaarR.M. Tiggelaar
- J.W. BerenschotJBJ.W. Berenschot
- J.G.E. GardeniersJGJ.G.E. Gardeniers
- G.R.B.E. RömerGRG.R.B.E. Römer
Open Access
- 1 October 2020
- journal article
- research article
- Published by Elsevier in Optics and Lasers in Engineering
- Vol. 133
Abstract
No abstract availableFunding Information
- H2020 Marie Skłodowska-Curie Actions
This publication has 33 references indexed in Scilit:
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