White-light interferometer with dispersion: an accurate fiber-optic sensor for the measurement of distance
Authors:
- 20 May 2005
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 44 (15) , 2978-2983
Abstract
We present a fiber-optical sensor for distance measurement of smooth and rough surfaces that is based on white-light interferometry; the sensor measures the distance from the sample surface to the sensor head. Because white light is used, the measurement is absolute. The measurement uncertainty depends not on the aperture of the optical system but only on the properties of the rough surface and is commonly ∼1 µm. The measurement range is approximately 1 mm. The sensor includes no mechanical moving parts; mechanical movement is replaced by the spectral decomposition of light at the interferometer output. The absence of mechanical moving parts enables a high measuring rate to be reached.Keywords
This publication has 11 references indexed in Scilit:
- Low-coherence interferometer system for the simultaneous measurement of refractive index and thicknessApplied Optics, 2002
- Spectroscopic polarimetry with a channeled spectrumOptics Letters, 1999
- Low-coherence interferometry with synthesis of coherence functionApplied Optics, 1999
- Surface-roughness measurement based on the intensity correlation function of scattered light under speckle-pattern illuminationApplied Optics, 1999
- Physikalische Grenzen der optischen Formerfassung mit LichtPhysikalische Blätter, 1997
- Laser triangulation: fundamental uncertainty in distance measurementApplied Optics, 1994
- Optical coherence domain reflectometry by synthesis of coherence functionJournal of Lightwave Technology, 1993
- Chromatic dispersion effects in coherent absolute rangingOptics Letters, 1992
- Three-dimensional sensing of rough surfaces by coherence radarApplied Optics, 1992
- Mirau correlation microscopeApplied Optics, 1990