Chemical character of BC x N y layers grown by CVD with trimethylamine borane
- 4 November 2008
- journal article
- research article
- Published by Wiley in X-Ray Spectrometry
- Vol. 38 (1) , 68-73
Abstract
Layers of BC x N y were produced in a chemical vapour deposition (CVD) process using trimethylamine borane with He, N 2 , and NH 3 , respectively, as precursor. These layers deposited on Si (100) wafers were characterized chemically by X‐ray photoelectron spectroscopy (XPS) and synchrotron radiation‐based total reflection X‐ray fluorescence analysis combined with near‐edge X‐ray absorption fine structure spectroscopy (TXRF‐NEXAFS). As a result, the composition of the material produced without NH 3 is a B‐C bonds containing compound with an atomic relation 1:1. Adding NH 3 with a partial pressure of up to about 1.3 Pa the product could be identified as B 2 C 2 N. Increasing the partial pressure of NH 3 to 1.7 and 2.1 Pa the product was enriched in nitrogen yielding a compound characterized as h‐BCN. In all cases an impurity of oxygen was observed. Copyright © 2008 John Wiley & Sons, Ltd.Keywords
This publication has 28 references indexed in Scilit:
- Chemical bonding in carbonitride nanolayersNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2007
- Thin Film Solar Cells: Materials Science at InterfacesAdvanced Engineering Materials, 2005
- Improvement of total reflection X-ray fluorescence analysis of low Z elements on silicon wafer surfaces at the PTB monochromator beamline for undulator radiation at the electron storage ring BESSY IISpectrochimica Acta Part B: Atomic Spectroscopy, 2001
- Identification of ternary boron–carbon–nitrogen hexagonal phases by x-ray absorption spectroscopyApplied Physics Letters, 2001
- Proposed synthesis path for heterodiamondNPhysical Review B, 1997
- Microstructure of BN:C films deposited on Si substrates by reactive sputtering from a B4C targetThin Solid Films, 1996
- BCN nanotubes and boron doping of carbon nanotubesChemical Physics Letters, 1996
- Electrical properties of BC2N thin films prepared by chemical vapor depositionJournal of Applied Physics, 1995
- Atomic arrangement and electronic structure ofNPhysical Review B, 1989
- Boron-carbon-nitrogen materials of graphite-like structureMaterials Research Bulletin, 1987