Laser terahertz-emission microscope for inspecting electrical faults in integrated circuits
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- 1 November 2003
- journal article
- Published by Optica Publishing Group in Optics Letters
- Vol. 28 (21) , 2058-2060
Abstract
A laser terahertz-emission microscope (LTEM) system is proposed and developed for inspecting electrical faults in integrated circuits (IC). We test a commercial operational amplifier while the system is operating. Two-dimensional terahertz-emission images of the IC chip are clearly observed while the chip is scanned with a femtosecond laser. When one of the interconnection lines is cut, the damaged chip has a LTEM image different from that of normal chips. The results indicate that the LTEM system is a potential tool for IC inspection.Keywords
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