Sensitive and Selective Photoacoustic Gas Sensor Suitable for High-Volume Manufacturing
Authors:
- 12 August 2008
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Sensors Journal
- Vol. 8 (9) , 1539-1545
Abstract
Sensitive and selective gas measurements are crucial for a large variety of applications. This paper describes the manufacturing and characterization of a photoacoustic gas sensor system. The system is based on a pressure sensor element with a sensitivity of 10 muV/V/Pa. To demonstrate and evaluate the concept, 12 prototypes for measuring CO2 have been manufactured and characterized. Detection limits ranging from 92 ppm to below 6 ppm CO2 were obtained with a path length of 10 cm, depending on the measurement time and photoacoustic cell design. Measurements showed no cross-sensitivity towards CO, CH4, or humidity in any of the sensors. The temperature drift of the uncompensated raw signal of two sensor designs was below 117 ppm CO2 in the range from 25degC to 50degC.Keywords
This publication has 6 references indexed in Scilit:
- High-resolution pressure sensor for photo acoustic gas detectionSensors and Actuators A: Physical, 2006
- Fabrication of Pt-Polysilicon Thin-Film Thermopiles: A Preliminary Study2006
- A Miniature Silicon Photo-Acoustic Detector for Gas Monitoring ApplicationsMeasurement and Control, 2001
- Optical-based UV-IR gas detector for monitoring hydrocarbons and toxic gases1995
- Ultralow Gas Concentration Infrared Absorption SpectroscopyJournal of Applied Physics, 1971
- Field Assisted Glass-Metal SealingJournal of Applied Physics, 1969