Downstream instabilities of electronegative plasma discharges
Authors:
- 1 February 2003
- journal article
- research article
- Published by AIP Publishing in Physics of Plasmas
- Vol. 10 (2) , 539-545
Abstract
Relaxation oscillations are observed in low-pressure inductive plasma discharges operated with argon and gas mixtures. The data suggest that instabilities may develop periodically at some downstream location. Linear fluid and kinetic calculations predict ion two-stream instabilities when the positive and negative ions develop sufficiently large drift velocities of opposite sign in the downstream region. The thresholds and the growth rates of the instabilities are calculated and are found in fair agreement with the observations. The instability models can explain several key experimental features.
Keywords
This publication has 12 references indexed in Scilit:
- Equilibrium properties of Ar/SF6 inductive plasma dischargesPlasma Sources Science and Technology, 2002
- Ion acoustic waves in one- and two-negative ion species plasmasPhysics of Plasmas, 2001
- Instabilities in low-pressure electronegative inductive dischargesPlasma Sources Science and Technology, 2001
- Electron Interactions With SF6Journal of Physical and Chemical Reference Data, 2000
- Instabilities in low-pressure inductive discharges with attaching gasesApplied Physics Letters, 1999
- Internal sheaths in electronegative dischargesJournal of Applied Physics, 1999
- Ion-acoustic waves in a multicomponent plasma with negative ionsPlasma Physics and Controlled Fusion, 1997
- An electronegative inductive discharge instabilityJournal of Applied Physics, 1996
- Negative ion plasmasThe Physics of Fluids, 1975
- Propagation and Damping of Ion Waves in a Plasma with Negative IonsThe Physics of Fluids, 1966