In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor
Authors:
- U. KrishnamoorthyUKU. Krishnamoorthy
- R.H. OlssonROR.H. Olsson
- G.R. BogartGBG.R. Bogart
- M.S. BakerMBM.S. Baker
- D.W. CarrDCD.W. Carr
- T.P. SwilerTST.P. Swiler
- P.J. ClewsPCP.J. Clews
- 1 July 2008
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 145-146, 283-290
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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