Design, fabrication and reliability study of piezoelectric ZnO based structure for development of MEMS acoustic sensor
- 18 July 2019
- journal article
- research article
- Published by Springer Nature in Microsystem Technologies
- Vol. 25 (12) , 4517-4528
Abstract
No abstract availableKeywords
Funding Information
- Anusandhan National Research Foundation (EMR/2017/005107)
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