COMBINED ELECTRON MICROSCOPICAL AND DLTS (ESP, DSLTS) INVESTIGATIONS IN SEMICONDUCTORS

Authors:
  • OBO. Breitenstein
    O. Breitenstein
  • JHJ. Heydenreich
    J. Heydenreich
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Abstract
A capacitively measuring Scanning DLTS system is introduced having a high detection sensitivity. Measuring examples achieved by combined application of SDLTS and SEM/EBIC on silicon and III-V compound samples demonstrate the possibilities of the method and the performance of the system