Metal Organic CVD of Cobalt Thin Films Using Cobalt Tricarbonyl Nitrosyl

Authors:

PLPenelope A. Lane
Penelope A. Lane
PWPeter J. Wright
Peter J. Wright

Publisher website

1 October 1998

journal article
research article
Published by Wiley in Chemical Vapor Deposition

Vol. 4 (5) , 183-186
DOI:10.1002/(sici)1521-3862(199810)04:05<183::aid-cvde183>3.0.co;2-m

Abstract

No abstract available

Keywords

Cited by 40 articles