Subarcsec High-Precision 3-D Spatial State Measurement System for an Optical Platform Based on Wavefront Phase Modulation

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Abstract
As the demand for stability in ultra-high precision optoelectronic system alignments continues to increase, synchronous three-dimensional spatial state measurements are necessary to ensure the accuracy and reliability of detection data. In this context, a three-dimensional interferometry system based on computer-generated hologram (CGH) wavefront modulation was proposed, in which an aspheric mirror was used as a reference mirror to reflect in real time the wavefront changes caused by platform instability. The relative position calibration of optoelectronic elements and wavefront modulation are realized based on CGH. By employing a dual-constraint ray tracing method and a spatial state sensitivity matrix, a model was established to realize a mapping relationship between the reference mirror three-dimensional spatial instability state parameters and the fitted Zernike polynomial coefficients of the wavefront difference grid matrix. The experimental validation of the proposed three-dimensional spatial state measurement system was conducted. Measurement results were obtained from wrapped phase data processed using Spatial phase unwrapping by applying Zernike polynomial fitting and the mapping relationship. The results demonstrated the system’s capability to achieve real-time synchronous measurement of tilt and displacement in three dimensions with a high level of accuracy, exhibiting a maximum deviation error of less than 0.2″ for tilt and 4μm for displacement, respectively. The system demonstrated excellent stability throughout the experiments. The relative standard uncertainties for tilt and displacement measurements are 1.74% and 2.98%, respectively.
Funding Information
  • National Natural Science Foundation of China (62105119, 62073150)
  • Science Project of Jilin Province Education Department (JJKH20231157KJ)
  • Pre-research Project (6B2B5347)

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