The Simplex architecture for safe online control system upgrades
Authors:
- B. KroghBKB. Krogh
- L. ShaLSL. Sha
- A. ChutinanACA. Chutinan
- 1 January 1998
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 6 (07431619) , 3504-3508 vol.6
Abstract
We describe the Simplex architecture, a real-time software technology which supports the safe, reliable introduction of control system upgrades while the system is running. We introduce its basic structure in control systems, discuss its fault-tolerance feature, and investigate the control issues when the technology is employed. Application of the Simplex architecture is demonstrated for a plasma-enhanced chemical vapor deposition (PECVD) system, a standard process in semiconductor manufacturing. We conclude the paper with a discussion of the potential impact that the Simplex architecture can make on future control applications.Keywords
This publication has 1 reference indexed in Scilit:
- Real-time multivariable control of PECVD silicon nitride film propertiesIEEE Transactions on Semiconductor Manufacturing, 1997