Screen-printed Pb(Mg, Nb)O3-PbTiO3 thick tilms on ceramic substrates for sensor applications
- 12 December 2016
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 055-058
Abstract
In this work the screen-printed piezoelectric 0.65Pb(Mg1/3Nb2/3)O3-0.35PbTiO3 thick films were prepared on metalized low-temperature co-fired ceramic substrates. Such substrates are interesting for micro-electro mechanical systems, for example for piezoelectric sensors and actuators. The prepared thick films exhibit the piezoelectric coefficient d33 equal to 120 pC/N.Keywords
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