Electromagnetic micro-device realized by electrochemical way
- 5 June 2001
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 91 (1-2) , 80-84
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Permalloy electroplating through photoresist moldsSensors and Actuators A: Physical, 1999
- High Q spiral-type microinductors on silicon substratesIEEE Transactions on Magnetics, 1999
- Monolithic Fabrication of Electroplated Solenoid Inductors Using Three-Dimensional Photolithography of a Thick PhotoresistJapanese Journal of Applied Physics, 1998
- Microcoils fabricated by UV depth lithography and galvanoplatingSensors and Actuators A: Physical, 1996
- A comparison of two micromachined inductors (bar- and meander-type) for fully integrated boost DC/DC power convertersIEEE Transactions on Power Electronics, 1996
- A fluxgate magnetic sensor with micro-solenoids and electroplated permalloy coresSensors and Actuators A: Physical, 1994
- Competitive Adsorption Effects in the Electrodeposition of Iron‐Nickel AlloysJournal of the Electrochemical Society, 1993
- The Anomalous Codeposition of Iron-Nickel AlloysJournal of the Electrochemical Society, 1965