Cross-contamination in single-chamber processes for thin-film silicon solar cells

This publication has 8 references indexed in Scilit:

• Single-chamber processes for a-Si:H solar cell deposition
  Solar Energy Materials and Solar Cells, 2012
• Influence of contaminations on the performance of thin-film silicon solar cells prepared after in situ reactor plasma cleaning
  Thin Solid Films, 2007
• Reduction of the boron cross-contamination for plasma deposition of p–i–n devices in a single-chamber large area radio-frequency reactor
  Thin Solid Films, 2004
• High-efficiency p-i-n a-Si:H solar cells with low boron cross-contamination prepared in a large-area single-chamber PECVD reactor
  Thin Solid Films, 2004
• Fast Deposition of a-Si:H Layers and Solar Cells in a Large-Area (40×40 cm²) VHF-GD Reactor
  MRS Proceedings, 1999
• a-Si:H/a-Si:H stacked cell from VHF-deposition in a single chamber reactor with 9% stabilized efficiency
  Solar Energy Materials and Solar Cells, 1997
• I n s i t u study of the thermal decomposition of B2H6 by combining spectroscopic ellipsometry and Kelvin probe measurements
  Journal of Applied Physics, 1989
• Hydrogenated amorphous silicon schottky solar cells: The effects of contamination by dopants in the undoped layer
  Solar Cells, 1983