On the visibility of small SiAs particles in silicon by HREM
Authors:
- A ArmigliatoAAA Armigliato
- A BourretABA Bourret
- S FrabboniSFS Frabboni
- A ParisiniAPA Parisini
- 29 January 2021
- book chapter
- Published by Taylor & Francis
- p. 55-60
Abstract
In a previous work on As+-implanted and annealed silicon we reported on the discrepancy between the electrically inactive arsenic and the amount of As atoms in the precipitates, as deduced from weak-beam and HREM observations. In this paper we discuss the contrast given in computed HREM images by spherical SiAs particles of 2 nm diameter with a sphalerite structure and coherent with the Si matrix. Different specimen thicknesses and imaging modes have been employed in the simulations. It is found that in areas thicker than about 10 nm the particles are invisible.Keywords
This publication has 1 reference indexed in Scilit:
- Precipitation and Diffusivity of Arsenic in SiliconJournal of the Electrochemical Society, 1985